On-line TOC, BORON Analyzers

Sievers UPW (Ultra pure water) Boron Analyzer

Sievers UPW (Ultra pure water) Boron Analyzer


The Sievers UPW (Ultra pure water) Boron Analyzer offers a limit of detection of 15 parts-per-trillion boron and up to 10 samples per hour, making continuous boron monitoring in ultrapure water very affordable and convenient for semiconductor and microelectronics applications. The Sievers UPW Boron Analyzer also exceeds ICP-MS performance, and does it at a fraction of the cost. A true "plug-and-play" boron measurement instrument, the Sievers Boron Analyzer can be installed in less than an hour, requires no skilled or trained operator, and provides the sensitivity and accuracy of ICP-MS or on-line Ion Chromatography. A built-in multiplexor even allows for monitoring of up to four sample streams with customizable settings for each stream.

Semiconductor, microelectronics and thin display manufacturers are using the Sievers UPW Boron Analyzer:

At the outlet of primary mixed-resin beds

Boron is released from these beds prior to silica, and continuous monitoring of bed effluent provides operators with the earliest indication of changing bed conditions and bed exhaustion.

At the outlet of polishing resins

The earliest indicator of polishing resin exhaustion, and a potential contaminant in wafer processing, real-time boron data from the polishing bed effluent is critical to today's advanced fabrication facilities.

At the outlet of Electrodeionization units

A well-run EDI balances power consumption against contaminant removal. Boron is weakly ionic, and is a critical indicator of EDI performance.

For regeneration processes

An expected source of boron in any UPW system is regenerated resins. Boron specifications for regenerated resins help ensure the lowest possible boron loading of UPW systems, thus minimizing future regenerations and polish resin contaminant loading.

Key features and benefits of the Sievers UPW Boron Analyzer include:

Continuous, On-line Monitoring as low as 15 ppt B

The Sievers Boron Analyzer cost effectively adds the security of continuous monitoring to the part-per-trillion sensitivity of ICP/MS. This ensures compliance with primary and polish loop boron specifications and gives facility managers a tool to protect against upset conditions and rapidly changing boron levels that would go undetected with ICP/MS or other laboratory analysis methods.

Ease of Use

Although the UPW Boron Analyzer is as sensitive as more expensive instrumentation, it is not more difficult to operate. A demonstration of the Analyzer can prove how simple this analyzer is to own, operate and maintain. Once installed, the analyzer can operate for up to 3 months with no operator intervention. At that time, a quick and simple re-filling of the reagent reservoir is all that is needed for another 3 months of hassle-free operation. Annual preventative maintenance takes less than an hour and requires no special skills or tools.

Return on Investment

Because boron is released from mixed-bed ion exchange resins before silica, the Boron Analyzer is an essential tool for pinpointing resin exhaustion in semiconductor applications. What does this mean to you? It means that you now have a tool that can prevent the feeding of polish-loop virgin resins with uncontrolled levels of boron from primary mixed beds. A reduction in virgin resin replacement or regenerations equates to a significant reduction in operating expenses. The UPW Boron Analyzer also prevents costly downtime and repairs due to silica buildup in turbines and boilers in power applications.


Driven by the contamination control needs in today's fabs and the cost savings associated with prolonged resin life, boron control is becoming the keystone of state-of-the-art water quality management programs worldwide. Only the Sievers brand UPW Boron Analyzer provides the means to significantly advance the quality and management of ultrapure water systems.

Operating Specifications
Concentration Range 0.05 ppb B
Limit of Detection (LOD) 0.015 ppb B
Accuracy ± 0.01 ppb B <0.05 ppb B
± 15% >0.05 ppb B
Precision ± 3% or 0.005 ppb B, whichever is greater
Minimum Sample
15 megaohms–cm
Sample Temperature 15°-40°C
Sample Flow Rate 0.05–0.5 L/min
Ambient Temperature 10°C–40°C
Sample Pressure 20–100 psi (138-689 kPa)
Calibration Stability At least 12 months
Sample Particulates 15 micron sample pre-filtration
Waste Gravity Drain
Instrument Specifications
Inputs 5 isolated binary inputs
Outputs 4 isolated 4-20mA outputs, 1 RS-232 (isolated), 1 universal parallel printer port, 2 alarm outputs, 4 isolated binary outputs
Dimensions 21.1 H x 17.4 W x 13.1 D inches (54 x 45 x 34 cm)
Weight 48 lbs (22kg)
Certifications CE
Boron Reagent 90 days at 5 samples/hour
45 days at 10 samples/hour
Reagent Column 12 months
Zero Column 12 months
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