On-line TOC, BORON Analyzers
Semiconductor, microelectronics and thin display manufacturers are using the Sievers UPW Boron Analyzer:
Boron is released from these beds prior to silica, and continuous monitoring of bed effluent provides operators with the earliest indication of changing bed conditions and bed exhaustion.
The earliest indicator of polishing resin exhaustion, and a potential contaminant in wafer processing, real-time boron data from the polishing bed effluent is critical to today's advanced fabrication facilities.
A well-run EDI balances power consumption against contaminant removal. Boron is weakly ionic, and is a critical indicator of EDI performance.
An expected source of boron in any UPW system is regenerated resins. Boron specifications for regenerated resins help ensure the lowest possible boron loading of UPW systems, thus minimizing future regenerations and polish resin contaminant loading.
Key features and benefits of the Sievers UPW Boron Analyzer include:
The Sievers Boron Analyzer cost effectively adds the security of continuous monitoring to the part-per-trillion sensitivity of ICP/MS. This ensures compliance with primary and polish loop boron specifications and gives facility managers a tool to protect against upset conditions and rapidly changing boron levels that would go undetected with ICP/MS or other laboratory analysis methods.
Although the UPW Boron Analyzer is as sensitive as more expensive instrumentation, it is not more difficult to operate. A demonstration of the Analyzer can prove how simple this analyzer is to own, operate and maintain. Once installed, the analyzer can operate for up to 3 months with no operator intervention. At that time, a quick and simple re-filling of the reagent reservoir is all that is needed for another 3 months of hassle-free operation. Annual preventative maintenance takes less than an hour and requires no special skills or tools.
Because boron is released from mixed-bed ion exchange resins before silica, the Boron Analyzer is an essential tool for pinpointing resin exhaustion in semiconductor applications. What does this mean to you? It means that you now have a tool that can prevent the feeding of polish-loop virgin resins with uncontrolled levels of boron from primary mixed beds. A reduction in virgin resin replacement or regenerations equates to a significant reduction in operating expenses. The UPW Boron Analyzer also prevents costly downtime and repairs due to silica buildup in turbines and boilers in power applications.
Driven by the contamination control needs in today's fabs and the cost savings associated with prolonged resin life, boron control is becoming the keystone of state-of-the-art water quality management programs worldwide. Only the Sievers brand UPW Boron Analyzer provides the means to significantly advance the quality and management of ultrapure water systems.
|Concentration Range||0.05 ppb B|
|Limit of Detection (LOD)||0.015 ppb B|
|Accuracy||± 0.01 ppb B <0.05 ppb B
± 15% >0.05 ppb B
|Precision||± 3% or 0.005 ppb B, whichever is greater|
|Sample Flow Rate||0.05–0.5 L/min|
|Sample Pressure||20–100 psi (138-689 kPa)|
|Calibration Stability||At least 12 months|
|Sample Particulates||15 micron sample pre-filtration|
|Inputs||5 isolated binary inputs|
|Outputs||4 isolated 4-20mA outputs, 1 RS-232 (isolated), 1 universal parallel printer port, 2 alarm outputs, 4 isolated binary outputs|
|Dimensions||21.1 H x 17.4 W x 13.1 D inches (54 x 45 x 34 cm)|
|Weight||48 lbs (22kg)|
|Boron Reagent||90 days at 5 samples/hour
45 days at 10 samples/hour
|Reagent Column||12 months|
|Zero Column||12 months|